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Bars of width near 100 nm

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Bars of width near 100 nm.

Bars of width near 100 nm
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Photonic crystal for visible wavelengths...
1. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
2. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
3. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
4. Two dimensional photonic crystal
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
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Bars of width near 100 nm
6. Bars of width near 100 nm
Square lattice type two dimensional photonic...
7. Square lattice type two dimensional photonic...
Overview of hexagonal lattice type photonic...
8. Overview of hexagonal lattice type photonic...
Hexagonal lattice type photonic crystal in...
9. Hexagonal lattice type photonic crystal in...
Two dimensional photonic crystal
10. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
11. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
12. Two dimensional photonic crystal
Hexagonal lattice of holes.
13. Hexagonal lattice of holes.
Fragment of hexagonal lattice type photonic...
14. Fragment of hexagonal lattice type photonic...
Photonic crystals with introduced lattice defects
15. Photonic crystals with introduced lattice defects
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
16. Real fabricated Si3N4...
Hexagonal lattice type photonic crystal in...
17. Hexagonal lattice type photonic crystal in...
Fragment of hexagonal lattice type photonic...
18. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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