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A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

A part of Bragg-Fresnel zone plate designed for X-ray of 8 keV (~1.5 Å) with focal distance 150 cm. The outmost zone is equal to 350 nm. The zone plate comprises patterned Au layer (220 nm in thickness) on Si substrate.

A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate designed...
1. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
4. Strips of 40 nm width in resist
System of lenses at the second monochromator...
5. System of lenses at the second monochromator...
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
Fragment of the last zones at the monochromator...
7. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
8. A part of Bragg-Fresnel zone plate designed...
Reflection Zone Plates for focusing X-rays
9. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
10. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
12. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate
13. A part of Bragg-Fresnel zone plate
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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