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Real fabricated Si3N4 photonic crystal sample

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Free standing Si3N4 photonic crystal membrane with hexagonal lattice of air holes.

Real fabricated Si<sub>3</sub>N<sub>4</sub> photonic crystal sample
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
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Overview of hexagonal lattice type photonic...
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Hexagonal lattice type photonic crystal in...
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Photonic crystals with introduced lattice defects
4. Photonic crystals with introduced lattice defects
Hexagonal lattice of holes.
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Fragment of hexagonal lattice type photonic...
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Two dimensional photonic crystal
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Photonic crystal for visible wavelengths...
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Fragment of hexagonal lattice type photonic...
9. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
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Two dimensional photonic crystal
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Photonic crystal for visible wavelengths...
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Overview of hexagonal lattice type photonic...
13. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
14. Two dimensional photonic crystal
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
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Hexagonal lattice type photonic crystal in...
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Real fabricated Si<sub>3</sub>N<sub>4</sub>...
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Bars of width near 100 nm
18. Bars of width near 100 nm
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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