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Hexagonal lattice type photonic crystal in S3N4

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Silicon nitride based two dimensional photonic crystals for visible spectral range

Hexagonal lattice type photonic crystal in S<sub>3</sub>N<sub>4</sub>
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Two dimensional photonic crystal
1. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
2. Overview of hexagonal lattice type photonic...
Photonic crystals with introduced lattice defects
3. Photonic crystals with introduced lattice defects
Square lattice type two dimensional photonic...
4. Square lattice type two dimensional photonic...
Hexagonal lattice type photonic crystal in...
5. Hexagonal lattice type photonic crystal in...
Hexagonal lattice type photonic crystal in...
6. Hexagonal lattice type photonic crystal in...
Photonic crystal for visible wavelengths...
7. Photonic crystal for visible wavelengths...
Overview of hexagonal lattice type photonic...
8. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
9. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
10. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
11. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
12. Fragment of hexagonal lattice type photonic...
Bars of width near 100 nm
13. Bars of width near 100 nm
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
14. Real fabricated Si3N4...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
15. Real fabricated Si3N4...
Hexagonal lattice of holes.
16. Hexagonal lattice of holes.
Two dimensional photonic crystal
17. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
18. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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